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Observation of the behavior of a laser‐ablated plume by laser imaging spectroscopic techniques
Author(s) -
Nakata Yoshiki,
Okada Tatsuo,
Maeda Mitsuo
Publication year - 1998
Publication title -
electrical engineering in japan
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.136
H-Index - 28
eISSN - 1520-6416
pISSN - 0424-7760
DOI - 10.1002/(sici)1520-6416(199809)124:4<18::aid-eej3>3.0.co;2-n
Subject(s) - plume , materials science , rayleigh scattering , laser , laser ablation , quenching (fluorescence) , spectroscopy , excited state , pulsed laser deposition , ablation , scattering , laser induced fluorescence , analytical chemistry (journal) , optics , atomic physics , thin film , fluorescence , chemistry , nanotechnology , physics , engineering , quantum mechanics , chromatography , aerospace engineering , thermodynamics
In order to investigate the behavior of species in the laser‐ablation plume during the pulsed‐laser deposition (PLD) process, the time‐resolved two‐dimensional laser‐induced fluorescence spectroscopy (2D‐LIF) and Rayleigh‐Mie scattering (2D‐RMS) systems have been developed. Results on PLD of high‐temperature superconducting thin films of YBa 2 Cu 3 O 7‐x (YBCO) are presented. First, the effects of Doppler and collisional quenching on the sensitivity of 2D‐LIF are examined. Then the spatial distributions of the ground state Cu atoms observed by these techniques, as well as excited particles in the laser ablation process of YBCO, are presented. The effect of substrate heating on plume propagation has been observed for the first time. 2D‐RMS was applied to visualize the behavior of particles directly ejected from the target and of particles condensed in the gas phase. © 1998 Scripta Technica, Electr Eng Jpn, 124(4): 18–26, 1998