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Improved understanding of physical defect mechanisms using fault simulation
Author(s) -
Garyet Terry C.,
Dickson Nicholas
Publication year - 1996
Publication title -
quality and reliability engineering international
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.913
H-Index - 62
eISSN - 1099-1638
pISSN - 0748-8017
DOI - 10.1002/(sici)1099-1638(199607)12:4<235::aid-qre40>3.0.co;2-x
Subject(s) - reliability engineering , mechanism (biology) , failure mechanism , fault (geology) , sample (material) , computer science , physical modelling , engineering , structural engineering , chemistry , geology , physics , geotechnical engineering , quantum mechanics , seismology , chromatography
Failure mechanisms in highly integrated designs are becoming more subtle, making them difficult to locate and understand. Successful analysis requires the precise location of the anomaly in three dimensions, prior to physical analysis, when strip and inspect techniques do not yield a failure mechanism. This paper presents a technique whereby simulations of hypothesized defects, in combination with I ‐ V curves obtained by electrical microprobing, aid in locating physical defects. Given the exact location, techniques requiring that the physical and chemical sample integrity be maintained, such as TEM and AES, can be employed to give insight into the failure mechanism.