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Semiconductor processing and manufacturing
Author(s) -
Shafarman William N.,
Basol Bulent M.,
Britt Jeff S.,
Hall Robert B.,
Rocheleau Richard E.
Publication year - 1997
Publication title -
progress in photovoltaics: research and applications
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 2.286
H-Index - 131
eISSN - 1099-159X
pISSN - 1062-7995
DOI - 10.1002/(sici)1099-159x(199709/10)5:5<359::aid-pip186>3.0.co;2-a
Subject(s) - semiconductor device fabrication , semiconductor , materials science , amorphous silicon , silicon , cadmium telluride photovoltaics , nanotechnology , inga , deposition (geology) , engineering physics , process engineering , optoelectronics , engineering , crystalline silicon , paleontology , sediment , wafer , agronomy , biology
The viability of semiconductor deposition and treatment processes for manufacturing are assessed and critical issues identified for CdTe, Cu(InGa)Se 2 , thin film silicon and amorphous silicon technologies. The focus is on increasing throughput and decreasing costs. Specific issues include deposition rate, materials utilization, adhesion, uniformity, equipment and process scale‐up, compatibility with subsequent processing, module performance and environmental concerns. © 1997 John Wiley & Sons, Ltd.