Premium
Temperature uniformity in RTP using MIMO adaptive control
Author(s) -
Morales S.,
Dahhou B.
Publication year - 1998
Publication title -
international journal of adaptive control and signal processing
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.73
H-Index - 66
eISSN - 1099-1115
pISSN - 0890-6327
DOI - 10.1002/(sici)1099-1115(199805)12:3<227::aid-acs462>3.0.co;2-u
Subject(s) - multivariable calculus , control theory (sociology) , mimo , adaptive control , temperature control , minification , computer science , quadratic equation , control engineering , engineering , mathematics , control (management) , mathematical optimization , artificial intelligence , computer network , channel (broadcasting) , geometry
In this paper the problem of temperature uniformity in Rapid thermal processing is addressed by means of multivariable adaptive control. A multivariable linear discrete time CARIMA model of the highly non‐linear process is identified on‐line using a supervised identification schema. The control law is based on the minimization of an infinite time linear quadratic cost function with a partial state reference model. This reference model allows to incorporate an appropriate tracking capability into the linear quadratic control law. Experimental results of the application of the involved MIMO adaptive controller on a RTP system are presented. © 1998 John Wiley & Sons, Ltd.