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Comparison of SnBr 4 and di‐n‐butyl tin diacetate as laser‐assisted chemical vapor deposition precursors for SnO 2 ‐based gas sensors
Author(s) -
Hossenlopp Jeanne M.,
Lamelas F. J.,
Middleton Kenneth,
Rzepiela Jeffrey A.,
Schmidt Jason D.,
Zivkovic Aleksandar
Publication year - 1998
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/(sici)1099-0739(199803)12:3<147::aid-aoc687>3.0.co;2-x
Subject(s) - chemistry , tin , chemical vapor deposition , copper , analytical chemistry (journal) , dopant , pulsed laser deposition , absorption spectroscopy , dissociation (chemistry) , impurity , ultraviolet , deposition (geology) , spectroscopy , thin film , doping , nanotechnology , organic chemistry , optoelectronics , materials science , optics , physics , quantum mechanics , sediment , biology , paleontology
Laser‐assisted chemical vapor deposition (LCVD) was utilized to produce SnO 2 films from SnBr 4 plus air, O 2 or N 2 O. SnO 2 films were successfully generated using either 222 or 308 nm laser pulses but there was evidence for film contamination when using less than 60 mJ/pulse laser energies at 222 nm. Films were characterized using ultraviolet absorption spectroscopy; the spectra of films with impurities resembled the spectrum of SnBr 4 . AFM images were obtained which indicated that this LCVD route produced small and fairly uniform SnO 2 grains which were 50–100 nm in size. Multiphoton ionization spectroscopy was used to verify that the dissociation of a film dopant precursor, copper(II) acetate, produced gas‐phase copper atoms under conditions similar to those used in film deposition experiments. The deposition of SnO 2 from SnBr 4 plus an oxidant was found to be more efficient than from di‐n‐butyl tin diacetate but films produced via this new LCVD route, including those doped with copper, were found to be much less sensitive in preliminary gas‐sensing screening. © 1998 John Wiley & Sons, Ltd.