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Multiphoton‐Induced Decomposition of Organometallics as a Route for Production of Doped SnO 2 Films
Author(s) -
Simianu Valerian C.,
Hossenlopp Jeanne M.
Publication year - 1997
Publication title -
applied organometallic chemistry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.53
H-Index - 71
eISSN - 1099-0739
pISSN - 0268-2605
DOI - 10.1002/(sici)1099-0739(199702)11:2<147::aid-aoc561>3.0.co;2-r
Subject(s) - chemistry , photodissociation , dopant , doping , tin , dissociation (chemistry) , chemical vapor deposition , photochemistry , selectivity , analytical chemistry (journal) , chemical engineering , organic chemistry , optoelectronics , catalysis , physics , engineering
A laser‐assisted chemical vapor deposition scheme for SnO 2 films has been developed, based on the UV multiphoton dissociation of di (n‐butyl) tin diacetate. Doped films were produced by simultaneous photolysis of other inorganic precursors. Films were characterized by UV–visible spectroscopy, room‐temperature resistance measurements in the presence of a variety of gas‐phase contaminants, and the temperature dependence of film resistance. These preliminary investigations demonstrate the ability to vary detection sensitivity and selectivity by changing the dopant precursor identity. © 1997 by John Wiley & Sons, Ltd.