Premium
Microswitches and microrelays with a view toward microwave applications
Author(s) -
Zavracky Paul M.,
McGruer Nicol E.,
Morrison Richard H.,
Potter David
Publication year - 1999
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/(sici)1099-047x(199907)9:4<338::aid-mmce5>3.0.co;2-q
Subject(s) - contact resistance , electroplating , microwave , ohm , optoelectronics , materials science , electrical engineering , microwave applications , electrical contacts , engineering physics , nanotechnology , engineering , dielectric , telecommunications , layer (electronics)
In this paper, we discuss our work on surface micromachined microswitches and microrelays that are based on electroplated materials. We have successfully fabricated devices with lifetimes exceeding 10 7 cycles cold switched at current levels exceeding 10 ma. Contact resistance is consistently below one ohm for a single contact. Multiple contact devices have much lower effective contact resistance. ©1999 John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 338–347, 1999.