Premium
Micromachined RF passive components and their applications in MMICs
Author(s) -
Sun Yanling,
Tauritz Joseph L.,
Baets Roel G. F.
Publication year - 1999
Publication title -
international journal of rf and microwave computer‐aided engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.335
H-Index - 39
eISSN - 1099-047X
pISSN - 1096-4290
DOI - 10.1002/(sici)1099-047x(199907)9:4<310::aid-mmce3>3.0.co;2-9
Subject(s) - monolithic microwave integrated circuit , engineering , radio frequency , electrical engineering , electronic engineering , computer science , amplifier , cmos
The design, fabrication, and characterization of micromachined RF passive components, including spiral inductors, Q ‐ and L ‐enhanced inductors, and MIM capacitors, monolithically realized on suspended membranes in an f T =15 GHz silicon bipolar process (DIMES‐03) are described. The performance of active inductors, active resonators, and oscillators incorporating suspended‐membrane components is compared to that of conventional MMIC circuit realization. ©1999 John Wiley & Sons, Inc. Int J RF and Microwave CAE 9: 310–325, 1999.