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Nonlinear calibrating for phase‐shifting adapter with three PZTs
Author(s) -
Zhu Yu,
Chen Jingbang,
Liu Hui,
Zhu Rihong,
Xiao Yuling
Publication year - 1999
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/(sici)1098-2760(19991120)23:4<209::aid-mop6>3.0.co;2-3
Subject(s) - adapter (computing) , calibration , interferometry , optics , microwave , nonlinear system , phase (matter) , engineering , electronic engineering , physics , materials science , electrical engineering , telecommunications , quantum mechanics
A method to calibrate a phase‐shifting adapter with three piezoelectric ceramics is proposed in this paper to increase the testing precision of phase‐shifting interferometry. The fast Fourier transform method is used to calibrate each of the PZTs, and the spatial geometry algorithm is used to calculate the stretching differences of every PZT. According to the differences and the curves of displacement versus the step of the applied voltage to each PZT, in situ calibration of the phase‐shifting adapter is allowed. Experimental work shows that, after calibration by this method, the rotation of the interferometer pattern and the change of fringe distances decline to 1° and 0.015 μm. ©1999 John Wiley & Sons, Inc. Microwave Opt Technol Lett 23: 209–212, 1999.