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Characteristics of proton‐exchanged wet etching on z ‐cut nickel‐indiffused lithium niobate
Author(s) -
Chang W. C.,
Chang S. J.,
Sue C. Y.,
Hsu C. L.
Publication year - 1998
Publication title -
microwave and optical technology letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.304
H-Index - 76
eISSN - 1098-2760
pISSN - 0895-2477
DOI - 10.1002/(sici)1098-2760(199807)18:4<250::aid-mop4>3.0.co;2-d
Subject(s) - lithium niobate , nickel , fabrication , microwave , materials science , ridge , etching (microfabrication) , proton , lithium (medication) , waveguide , optics , mineralogy , optoelectronics , composite material , metallurgy , chemistry , geology , engineering , physics , medicine , telecommunications , paleontology , alternative medicine , pathology , layer (electronics) , quantum mechanics , endocrinology
In this letter, the wet etching technique is utilized to determine the proton exchange (PE) depth of z ‐cut nickel‐indiffused lithium niobate under different nickel indiffusion parameters. It is demonstrated that the existence of nickel atoms reduces the PE depth. While this result was applied to the fabrication of a ridge‐type waveguide, the tilt angle of the sidewall on the ridge waveguide was about 70°, which has been successfully increased. © 1998 John Wiley & Sons, Inc. Microwave Opt Technol Lett 18: 250–252, 1998.