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Scanning tomographic acoustic microscopy: Development and applications
Author(s) -
Kent S. Davis,
Lee Hua
Publication year - 1997
Publication title -
international journal of imaging systems and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1098-1098
pISSN - 0899-9457
DOI - 10.1002/(sici)1098-1098(1997)8:3<255::aid-ima3>3.0.co;2-9
Subject(s) - opacity , tomographic reconstruction , characterization (materials science) , acoustic microscopy , nondestructive testing , ultrasonic sensor , materials science , tomography , microscopy , computer science , microscope , optics , acoustics , nanotechnology , physics , quantum mechanics
The scanning tomographic acoustic microscope (STAM) is a device capable of performing subsurface imaging of microscopic specimens. Using ultrasonic energy to interrogate specimens, the STAM nondestructively obtains accurate two‐ and three‐dimensional reconstructions of the internal structures of materials that are opaque to light. Applications include the nondestructive evaluation of integrated circuits and composite materials, characterization of the acoustical properties of substances, and examination of the condition of biological tissues. This article describes the design and development of the STAM, its capabilities, and applications using data obtained from a fully automated and integrated prototype. © 1997 John Wiley & Sons, Inc. Int J Imaging Syst Technol, 8, 255–262, 1997