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Synthesis and characterization of Teflon‐like macromolecular structures from dodecafluorocyclohexane and octadecafluorodecalin under RF‐cold‐plasma conditions
Author(s) -
Denes F.,
Hua Z. Q.,
Simonsick W. J.,
Aaserud D. J.
Publication year - 1999
Publication title -
journal of applied polymer science
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.575
H-Index - 166
eISSN - 1097-4628
pISSN - 0021-8995
DOI - 10.1002/(sici)1097-4628(19990307)71:10<1627::aid-app10>3.0.co;2-d
Subject(s) - polytetrafluoroethylene , materials science , thermal stability , dielectric , polymer , substrate (aquarium) , polymer chemistry , layer (electronics) , macromolecule , chemical engineering , characterization (materials science) , deposition (geology) , fluorine , fourier transform infrared spectroscopy , composite material , nanotechnology , chemistry , optoelectronics , paleontology , oceanography , engineering , geology , biochemistry , sediment , metallurgy , biology
The chemical inertness, thermal stability, and low dielectric constant characteristics of polytetrafluoroethylene make this polymer very attractive for advanced technology applications. Current production technologies are not adequate for the deposition of often desired, thin‐layer Teflon coatings. In this article the synthesis and characterization of Teflon‐like macromolecular structures from dodecafluorocyclohexane and octadecafluorodecaline vapors under RF‐cold‐plasma conditions is discussed. It was demonstrated, based on high‐resolution ESCA, ATR‐FTIR, and LD‐FT‐ICR‐MS investigations, that the deposited Teflon‐like layers are built of CF, CF 2 , CF 3 , and ex situ origin CO groups with an over 60% fluorine content, and that they have a branched and/or crosslinked nature. These structures have a relatively high thermal stability (340°C) and are characterized by a low dielectric constant (2.1). Plasma‐enhanced coatings of Teflon‐like layers can be performed at room temperatures at large substrate areas. © 1999 John Wiley & Sons, Inc. J Appl Polym Sci 71: 1627–1639, 1999