Premium
Non‐destructive, in situ measurements of diamond‐like‐carbon film hardness using Raman and Rayleigh scattering
Author(s) -
Amer Maher S.,
Busbee J.,
Leclair Steven R.,
Maguire John F.,
Johns J.,
Voevodin A.
Publication year - 1999
Publication title -
journal of raman spectroscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.748
H-Index - 110
eISSN - 1097-4555
pISSN - 0377-0486
DOI - 10.1002/(sici)1097-4555(199910)30:10<947::aid-jrs463>3.0.co;2-8
Subject(s) - rayleigh scattering , raman spectroscopy , materials science , diamond , diamond like carbon , raman scattering , composite material , nanoindentation , indentation hardness , hardness , coating , optics , thin film , nanotechnology , microstructure , physics
Diamond‐like Carbon (DLC) coatings have recently proven to be suitable for a number of tribological applications. Hardness of the DCL coating is very important for such application. An in‐situ, non‐destructive technique to measure the film hardness would be crucial for process control and quality control of DLC coatings. In this study, Raman and Rayleigh scattering were investigated as potential techniques for non‐destructive measurements of DLC film hardness. Features in both Raman and Rayleigh spectra were correlated with film hardness as measured by nano‐indentation technique. Regarding the Raman spectra of the film, a linear correlation was found between film hardness and area under diamond related peak at 1332 cm −1 . Regarding the Rayleigh scattering, a linear relationship was, also, found between the film hardness and the height of the Rayleigh line. Raman and Rayleigh scattering have shown huge potential to be used as non‐destructive, in‐situ techniques to measure DLC coating hardness. Copyright © 1999 John Wiley & Sons, Ltd.