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Application of SERS to study chemical vapour deposition processes: the example of diamond films
Author(s) -
LópezRíos T.,
Sandré E.
Publication year - 1998
Publication title -
journal of raman spectroscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.748
H-Index - 110
eISSN - 1097-4555
pISSN - 0377-0486
DOI - 10.1002/(sici)1097-4555(199808)29:8<733::aid-jrs292>3.0.co;2-t
Subject(s) - chemical vapor deposition , diamond , raman scattering , raman spectroscopy , polyacetylene , deposition (geology) , nanotechnology , materials science , chemical engineering , chemistry , optoelectronics , composite material , optics , doping , paleontology , physics , engineering , sediment , biology
The use of surface‐enhanced Raman scattering (SERS) for chemical vapor deposition (CVD) investigations is reviewed. As an example, CVD diamond growth from CH 4 and H 2 assisted by a hot filament was studied in situ using SERS. trans ‐ Polyacetylene formation during diamond growth was clearly demonstrated. The possible role of polyacetylene in diamond formation is discussed. © 1998 John Wiley & Sons, Ltd.