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Waveguide Raman Spectroscopy of Si(Ti)O 2 Thin Films with Grating Coupling
Author(s) -
Goutev N.,
Nickolov Zh. S.,
Ramsden J. J.
Publication year - 1996
Publication title -
journal of raman spectroscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.748
H-Index - 110
eISSN - 1097-4555
pISSN - 0377-0486
DOI - 10.1002/(sici)1097-4555(199612)27:12<897::aid-jrs49>3.0.co;2-r
Subject(s) - raman spectroscopy , grating , materials science , coupling (piping) , waveguide , optoelectronics , spectroscopy , optics , thin film , nanotechnology , physics , composite material , quantum mechanics
Good‐quality Raman spectra of thin Si(Ti)O 2 planar optical waveguides are reported. The exciting light was coupled into the waveguides via a grating coupler. The Raman signal from the films could be successfully discriminated from that of the glass substrate on which the waveguiding films were deposited. Sol–gel waveguides pyrolysed at 500°C and sputtered waveguides annealed at 500°C were found to have similar spectra. From their analysis it was concluded that TiO 2 is present as anatase with almost the same degree of microcrystallinity in both types of film.