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Surface‐sensitive x‐ray fluorescence and diffraction analysis with grazing‐exit geometry
Author(s) -
Noma T.,
Takada K.,
Iida A.
Publication year - 1999
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199911/12)28:6<433::aid-xrs386>3.0.co;2-c
Subject(s) - diffraction , optics , microbeam , angular resolution (graph drawing) , thin film , x ray fluorescence , synchrotron radiation , materials science , synchrotron , x ray , surface (topology) , fluorescence , geometry , physics , nanotechnology , mathematics , combinatorics
Surface‐sensitive x‐ray analysis techniques are explained. Using grazing‐exit geometry, structural information about a sample surface could be obtained by measuring the angular distribution of x‐ray fluorescence or x‐ray diffraction intensity. A model based on the reciprocity theorem was used and its correctness was confirmed by achieving good agreement with experimental results. The interference of fluorescent x‐rays in layered thin films was observed. The refraction effect in x‐ray diffraction was detected. These phenomena can be utilized in thin‐film characterization. Use of a synchrotron x‐ray microbeam in combination with the grazing‐exit condition permitted surface analysis with lateral spatial resolution. Layered thin films were characterized. The principle of this method and results obtained are presented. Copyright © 1999 John Wiley & Sons, Ltd.