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IntriX: a numerical model for electron probe analysis at high depth resolution. Part II—tests and confrontation with experiments
Author(s) -
Staub P.F.,
Jonnard P.,
Vergand F.,
Thirion J.,
Bonnelle and C.
Publication year - 1998
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199801/02)27:1<58::aid-xrs248>3.0.co;2-4
Subject(s) - monte carlo method , ionization , range (aeronautics) , homogeneous , electron , resolution (logic) , computational physics , cathode ray , atomic physics , physics , nuclear physics , statistical physics , materials science , ion , statistics , mathematics , computer science , quantum mechanics , artificial intelligence , composite material
The model called IntriX, designed to interpret quantitatively electron probe analysis data, was tested via confrontations between its results and experimental or Monte Carlo data. These confrontations were established for in‐depth ionization distributions Φ(ρ z ) and characteristic x‐ray relative intensities in cases of homogeneous and stratified samples, and for wide ranges of incident beam energies (1.15< E 0 <30 keV) and overvoltages (1.3< E 0 / E S <10). Measurements are presented that allow the performance of IntriX to be tested in the low‐energy range ( E 0 <5 keV). © 1998 John Wiley & Sons, Ltd.