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An x‐ray guide tube and a desk‐top scanning x‐ray analytical microscope
Author(s) -
Hosokawa Yoshinori,
Ozawa Sumito,
Nakazawa Hiromoto,
Nakayama Yasuyuki
Publication year - 1997
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199711/12)26:6<380::aid-xrs237>3.0.co;2-#
Subject(s) - x ray , desk , x ray tube , microscope , tube (container) , optics , materials science , physics , engineering , mechanical engineering , composite material , electrode , anode , quantum mechanics
A fine x‐ray beam, less than 10 μm in diameter, was produced using a small x‐ray tube and an x‐ray guide tube (XGT) with a parabolic inner contour. The beam was directed vertically on to the sample, which was mounted on an x – y scanning stage. The transmitted x‐rays were measured with an NaI(Tl) scintillation detector and the fluorescent, back‐scattered and diffracted x‐rays were simultaneously detected by an hp‐Si detector. The scanning images of transmitted, fluorescent and other x‐rays were obtained by accumulating the detected signals. A scanning image of the lower layer of a four‐layer, printed‐circuit board was obtained by subtracting the fluorescent x‐ray image from the x‐ray transmitted image. Using diffracted x‐rays, distribution images of crystal grains could be made. The method for fabricating the XGT is described and examples of applications of a desk‐top scanning x‐ray analytical microscope are shown. © 1997 John Wiley & Sons, Ltd.