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Electron Probe Microanalysis of Insulating Oxides: Monte Carlo Simulations
Author(s) -
Jbara O.,
Portron B.,
Mouze D.,
Cazaux J.
Publication year - 1997
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199709)26:5<291::aid-xrs226>3.0.co;2-x
Subject(s) - monte carlo method , electron , microanalysis , electric field , materials science , deposition (geology) , field (mathematics) , atomic physics , computational physics , condensed matter physics , physics , chemistry , nuclear physics , paleontology , statistics , mathematics , organic chemistry , quantum mechanics , sediment , pure mathematics , biology
Using a model for the electric field built up in insulating materials irradiated by electrons, a Monte Carlo simulation method has been applied to the binary oxides Al 2 O 3 , MgO, SiO 2 , Y 2 O 3 and Nb 2 O 5 . The results show the alteration of the shape of the depth distribution of characteristic x‐ray production, the Φ(ρ z ) function, for both metal and oxygen Kα lines. The influence of the electric field built up on the measured x‐ray intensities was clearly established. The changes in other physical quantities, such as the energy and angular distribution of backscattering electrons and energy deposition were also investigated. © 1997 John Wiley & Sons, Ltd.