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First Use of NTD Germanium‐Based Microcalorimeters For High‐Resolution, Broadband X‐Ray Microanalysis
Author(s) -
Silver Eric,
LeGros Mark,
Austin Gerry,
Madden Norm,
Beeman Jeffrey,
Haler Eugene
Publication year - 1997
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199709)26:5<265::aid-xrs204>3.0.co;2-w
Subject(s) - germanium , microanalysis , silicon , resolution (logic) , excited state , scanning electron microscope , tungsten , materials science , analytical chemistry (journal) , optics , optoelectronics , chemistry , physics , atomic physics , metallurgy , organic chemistry , chromatography , artificial intelligence , computer science
Broadband, high‐resolution x‐ray spectra from samples excited by the electron beam of a scanning electron microscope were obtained with an NTD germanium‐based microcalorimeter. An energy resolution of 8 eV was used to resolve completely the silicon Kα from the tungsten Mα x‐rays. This performance will make it possible to analyze efficiently the composition of thin films and surface contaminants by using low electron excitation energies. © 1997 John Wiley & Sons, Ltd.