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Multilayer and Thin Film Analysis Using FPMulti Software
Author(s) -
Bekkers M. H. J.,
van Sprang H. A.
Publication year - 1997
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199705)26:3<122::aid-xrs220>3.0.co;2-v
Subject(s) - thin film , range (aeronautics) , computer science , software , layer (electronics) , materials science , analytical chemistry (journal) , nanotechnology , chemistry , composite material , chromatography , programming language
X‐ray spectrometry combined with a fundamental parameter package can be used to obtain semiquantitative analytical results for thin layered samples. This paper explores the use of the program FPMulti for various applications. These applications are examples of how accurate this program is for multilayer and thin film analysis. After a short description of the analytical method, the range of applications is given with which the authors have experience. In the experimental section three applications are described in more detail: (i) an example to show the accuracy of the method, (ii) an example of the calculation of the layer thickness and (iii) the possibility of quantifying oxygen in 3d metal oxides. © 1997 by John Wiley & Sons, Ltd.