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Some Experimental Evidence for the Φ(0) Variation in EPMA of Insulating Materials
Author(s) -
Benhayoune H.,
Jbara O.
Publication year - 1996
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199609)25:5<229::aid-xrs170>3.0.co;2-#
Subject(s) - variation (astronomy) , electron microprobe , materials science , metallurgy , physics , astrophysics
EDS–EPMA was used to measure the x‐ray signal intensity emitted by a thin metallic coating on an insulator substrate (polycrystalline Al 2 O 3 ). For each primary beam energy E 0 , the x‐ray signal intensity obtained when the substrate had been precharged was compared with a nominal x‐ray signal intensity measured under the same conditions with an uncharged substrate. The backscattering coefficient η was evaluated simultaneously by using Bishop's method. It was demonstrated experimentally that the charging effects may lead to overestimation of the thickness of the metallic coating.