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Chemical effects in soft X‐ray spectra even with multilayers: Silicon L spectra using a ‘300 Å’ device
Author(s) -
Habulihaz Bahanu,
Martins E.,
Gamblin S.,
Urch D. S.
Publication year - 1996
Publication title -
x‐ray spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.447
H-Index - 45
eISSN - 1097-4539
pISSN - 0049-8246
DOI - 10.1002/(sici)1097-4539(199601)25:1<15::aid-xrs131>3.0.co;2-k
Subject(s) - spectral line , silicon , materials science , spectrometer , resolution (logic) , analytical chemistry (journal) , emission spectrum , x ray , optics , optoelectronics , chemistry , physics , chromatography , astronomy , artificial intelligence , computer science
Silicon L 2,3 M x‐ray emission spectra are reported for Si, SiC, Si 3 N 4 , ‘SiO’, SiO 2 , Mg 2 Si, Ca Si 2 , Ba 2 Si 4 , Cr Si 2 and Mo Si 2 . In all cases the spectra were recorded using a conventional x‐ray emission spectrometer fitted with a multilayer of nominal 2 d spacing 300 Å (second order). Despite the poor resolution characteristics of commercial multilayers (λ/Δλ ≅ 50), spectra showing distinct chemical effects were seen in all cases. Comparison with high‐resolution results from a grating spectrometer showed that the principal structural features of the spectra were reproduced using the ‘300’ multilayer. This demonstrates that, even when a multilayer with low resolution is used to disperse soft x‐rays, chemical effects can be observed at long wavelengths.