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A New Focused Ion Beam Optical System for a Time‐of‐flight‐Secondary Ion Mass Spectrometry Instrument
Author(s) -
Shichi H.,
Osabe S.,
Kanehori K.
Publication year - 1997
Publication title -
rapid communications in mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.528
H-Index - 136
eISSN - 1097-0231
pISSN - 0951-4198
DOI - 10.1002/(sici)1097-0231(19970131)11:2<175::aid-rcm725>3.0.co;2-k
Subject(s) - chemistry , electrostatic lens , mass spectrometry , ion beam , ion source , beam (structure) , secondary ion mass spectrometry , lens (geology) , time of flight , ion , acceleration , focused ion beam , ion beam deposition , optics , analytical chemistry (journal) , physics , chromatography , organic chemistry , classical mechanics
A new focused ion beam optical system that uses a liquid metal ion source was designed for a new secondary ion time‐of‐flight mass spectrometry instrument. This optical system consists mainly of two electrostatic lenses. The axial performance of the system was calculated to decide the design values to be adopted. A calculated minimum beam diameter of 10 nm and a mean current of 4 pA, which are sufficient for highly sensitive microarea element analysis, were obtained under the conditions where the acceleration voltage was 40 kV, the working distance between the einzel objective lens and a sample was 6 mm, and the thickness of the objective lens was 8 mm. © 1997 John Wiley & Sons, Ltd.