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An in situ nanoindentation specimen holder for a high voltage transmission electron microscope
Author(s) -
Wall M. A.,
Dahmen U.
Publication year - 1998
Publication title -
microscopy research and technique
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.536
H-Index - 118
eISSN - 1097-0029
pISSN - 1059-910X
DOI - 10.1002/(sici)1097-0029(19980915)42:4<248::aid-jemt3>3.0.co;2-m
Subject(s) - nanoindentation , in situ , transmission electron microscopy , materials science , electron microscope , conventional transmission electron microscope , scanning electron microscope , voltage , nanotechnology , scanning transmission electron microscopy , optics , composite material , chemistry , electrical engineering , engineering , physics , organic chemistry
We describe in detail, the design, construction, and testing of a specimen holder that allows for the nanoindentation of surfaces while viewing in cross‐section in a high voltage transmission electron microscope (TEM). This nanoindentation specimen holder, having three‐axis position control of a diamond indenter in combination with micromachined specimens, allows for the first time the dynamic observation of subsurface microstructure evolution under an indenter tip. Additionally, the sample design techniques that have been developed for these procedures may eliminate the need for TEM specimen preparation for additional ex situ nanoindentation experiments. Initial experimental results from in situ indentation of Si samples in the high voltage electron microscope are reported here to demonstrate the capability of this new specimen holder. Miscrosc. Res. Tech. 42:248–254, 1998. © 1998 Wiley‐Liss, Inc.