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Oriented growth of sol–gel‐modified PbTiO 3 thin films on Si‐based substrates
Author(s) -
González A.,
Poyato R.,
Jiménez R.,
Mendiola J.,
Pardo L.,
Calzada M. L.
Publication year - 2000
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(200005)29:5<325::aid-sia873>3.0.co;2-b
Subject(s) - materials science , texture (cosmology) , crystallization , substrate (aquarium) , spin coating , thin film , diffraction , sol gel , perovskite (structure) , thermal treatment , chemical engineering , analytical chemistry (journal) , crystallography , composite material , optics , nanotechnology , chemistry , chromatography , oceanography , physics , artificial intelligence , computer science , engineering , image (mathematics) , geology
A sol–gel Pb 0.76 Ca 0.24 TiO 3 solution was deposited by spin‐coating onto Pt/Ti/SiO 2 /Si(100), Ti/Pt/Ti/SiO 2 / Si(100) and Pt/TiO 2 /SiO 2 /Si(100) substrates. As‐prepared substrates and those subjected to a thermal treatment in air at 650 °C for 1800 s were used. The wet films were dried at 350 °C for 60 s and crystallized in air by rapid thermal processing (RTP) at 650 °C for 50 s, with a heating rate of ∼30 °C s −1 . This procedure was repeated four times to obtain crystalline films with a thickness of ∼250–300 nm. Perovskite films with different textures were obtained after crystallization. This texture was a consequence of the multilayer structure of the substrate. The formation of Pb 0.76 Ca 0.24 TiO 3 films with a preferred orientation in the 〈 111〉 direction of the perovskite was observed when Ti was present at the top surface of the Pt. Texture of the films was studied by x‐ray diffraction (XRD) and the structure of the substrate surfaces was studied by grazing incidence x‐ray diffraction (GIXRD). Spontaneous pyroelectric coefficients were measured in the films. Copyright © 2000 John Wiley & Sons, Ltd.