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Nature of noise in SIMS depth profiling data
Author(s) -
Makarov V. V.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199909)27:9<801::aid-sia575>3.0.co;2-z
Subject(s) - poisson distribution , profiling (computer programming) , noise (video) , instability , computational physics , statistical physics , physics , statistics , mathematics , quantum mechanics , computer science , artificial intelligence , image (mathematics) , operating system
The nature of noise in SIMS depth profiling data has been investigated theoretically. I show that, as earlier experiments proved, the noise of the signal measured with a perfect (absolutely stable) SIMS instrument obeys Poisson's law. Theoretical analysis of the contributions from statistical fluctuations and the SIMS instrument operation instability to the noise has shown that deviation from Poisson's law originates from unstable operation of the SIMS instrument. An analytical expression for the noise has been obtained and this agrees well with experimental data. Copyright © 1999 John Wiley & Sons, Ltd.