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Investigation of tetrahedral amorphous carbon films using x‐ray photoelectron and Raman spectroscopy
Author(s) -
Tay B. K.,
Shi X.,
Tan H. S.,
Chua Daniel H. C.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199908)28:1<231::aid-sia583>3.0.co;2-3
Subject(s) - raman spectroscopy , x ray photoelectron spectroscopy , amorphous carbon , analytical chemistry (journal) , amorphous solid , carbon fibers , carbon film , chemistry , deposition (geology) , materials science , thin film , crystallography , nuclear magnetic resonance , optics , nanotechnology , organic chemistry , paleontology , sediment , biology , physics , composite number , composite material
Amorphous carbon containing very little hydrogen and having a highly tetrahedral structure has been prepared by the Filtered Cathodic Vacuum Arc (FCVA) technique under different deposition temperatures. Based on Raman measurement, it was found that the I D / I G intensity ratio, the G band peak position and the linewidth change with deposition temperature. From XPS measurement, it was demonstrated that four Gaussians components were required to have a good fit of the C 1s spectra of amorphous carbon film from which the relative concentration of sp 3 /sp 2 hybrids can be determined easily. These observations, together with the carbon network structure deduced from the Raman spectra, demonstrate that deposition temperature is an important factor in determining film properties such as sp 3 content. Specifically, it was observed that the sp 3 content derived from the Raman spectra parameter ( I D / I G ratio) correlates well with that deduced from the XPS measurement data. Copyright © 1999 John Wiley & Sons, Ltd.