Premium
Development of x‐ray and extreme ultraviolet (EUV) optical devices for diagnostics and instrumentation for various surface applications
Author(s) -
Bruch R.,
Merabet H.,
Bailey M.,
Showers S.,
Schneider D.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199904)27:4<236::aid-sia549>3.0.co;2-9
Subject(s) - extreme ultraviolet lithography , extreme ultraviolet , grating , optics , spectrometer , optoelectronics , polarization (electrochemistry) , materials science , physics , laser , chemistry
New methods of surface‐sensitive instrumentation for thediagnostics of extreme ultraviolet (EUV), soft x‐ray(SXR) and x‐ray radiation have been developed. Inparticular, these methods of instrumentation are of great importancefor studies of the interaction of electron, ion and photon beams withmatter (atoms, molecules, ions, clusters, surfaces,micro‐ and submicron structures). Such collision studiesare based on both glass capillary converters (GCCs) andmultilayer mirrors (MLMs), gratings and crystals. Theoptical GCC device provides guiding, focusing and polarizationanalysis of short‐wavelength radiation with a large bandwidth,and the MLM, grating and crystal optical elements are used fordispersing, focusing and polarization‐sensitive studies ofradiation within a more narrow bandwidth. In particular, we reporthere on the development of optical diagnostic devices, such as verycompact EUV and SXR spectrometers, for measurements of polarizationand spectral characteristics of short‐wavelength radiation.Our high‐throughput and high resolution compact spectrometersfor the SXR range are based on grazing incidence spectrometers, MLMsand a sliced multi‐layer grating (SMG) novel type ofdispersion element. Furthermore, we will utilize a Schwarzschildobjective with a spatial resolution of ∽0.1–0.3 μm forimaging surfaces following ion–surface interaction. Copyright© 1999 John Wiley & Sons, Ltd.