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Classical dynamics simulation of projectile–surface interactions
Author(s) -
Karolewski M. A.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199902)27:2<114::aid-sia466>3.0.co;2-1
Subject(s) - projectile , scattering , ion , sputtering , morse potential , physics , computational physics , inelastic scattering , molecular dynamics , atomic physics , statistical physics , chemistry , optics , thin film , quantum mechanics
A public‐domain package of programs for the personalcomputer, the Simulation Kit (SK), has beendeveloped for the simulation and visualization of collisions oflow‐energy (<10 keV) atomic projectiles withsolid target lattices. Possible applications of the SK include thesimulation of ion scattering spectra, sputtering coefficients,reflection coefficients and projectile ranges. The simulation modelused by the SK is based on classical dynamics, and uses a compositescreened‐Coulomb/Morse pair potential to modelinteractions between particles in the target. The simulation modelalso incorporates inelastic scattering effects based on theLindhard–Schiøtt–Scharff, Oen–Robinson andShapiro–Tombrello models, respectively. The physical basis ofthe simulation model is described, and examples are provided ofapplications in ion beam analysis (ion scattering spectrometry,sputter yields). Copyright © 1998 John Wiley & Sons,Ltd.