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Angle‐resolved x‐ray photoelectron spectroscopy studies of the evolution of plasma‐treated surfaces with time
Author(s) -
Paynter R. W.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199902)27:2<103::aid-sia477>3.0.co;2-1
Subject(s) - overlayer , x ray photoelectron spectroscopy , polystyrene , aluminium , analytical chemistry (journal) , substrate (aquarium) , diffusion , plasma , helium , nitrogen , chemistry , materials science , chemical engineering , composite material , polymer , thermodynamics , environmental chemistry , organic chemistry , oceanography , physics , quantum mechanics , engineering , geology
Abstract Coupons of polished aluminium, glass and polystyrene were exposedto radiofrequency (r.f.) plasmas containing helium,nitrogen and oxygen. Angle‐resolved XPS measurements of thetreated surfaces were made immediately, after a few days and afterabout 9 months. The data were interpreted in terms of a simplifiedsubstrate–overlayer model with allowance for fractionalcoverage. The results are consistent with surface cleaning followedby hydrocarbon re‐contamination for aluminium and glass, andwith the diffusion of adatoms towards the bulk in the case ofpolystyrene. Copyright © 1999 John Wiley & Sons, Ltd.