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Glow discharge optical emission spectrometry (GDOES) depth profiling analysis of anodic alumina films—a depth resolution study
Author(s) -
Shimizu K.,
Brown G. M.,
Habazaki H.,
Kobayashi K.,
Skeldon P.,
Thompson G. E.,
Wood G. C.
Publication year - 1999
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199901)27:1<24::aid-sia457>3.0.co;2-n
Subject(s) - glow discharge , analytical chemistry (journal) , impurity , anode , mass spectrometry , secondary ion mass spectrometry , resolution (logic) , chemistry , materials science , electrode , plasma , chromatography , physics , organic chemistry , quantum mechanics , artificial intelligence , computer science
Anodic alumina films with precisely known distributions ofincorporated species have been used as standards for glow dischargeoptical emission spectrometry (GDOES) depth profilinganalysis to quantify depth resolution. It is evident that the depthresolution of GDOES is excellent and is comparable with, or betterthan, secondary ion mass spectrometry depth profiling of similarfilms. Further, the sensitivity for detection of elements is alsohigh, given the amounts of impurity species detected successfully.Thus, GDOES, with its further ability of routine and rapid analysisof films (organic, inorganic or metallic) of thicknesses upto several hundreds of microns, has significant potential in studiesof the corrosion and filming behaviour of materials. © 1999 JohnWiley & Sons, Ltd.