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On the performance of the TRIM simulation for the evaluation of auger depth profiles
Author(s) -
Menyhard M.
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199812)26:13<1001::aid-sia448>3.0.co;2-c
Subject(s) - auger , trim , auger effect , materials science , ion , penetration depth , optics , chemistry , analytical chemistry (journal) , atomic physics , computer science , physics , organic chemistry , chromatography , operating system
Thin‐film structures several monolayers thick can be observed by Auger depth profiling if specimen rotation, grazing angle of incidence and low ion energy are used. To evaluate depth profiles measured on such features, we developed a trial‐and‐error type of evaluation technique. First we simulated the depth profile for an arbitrary in‐depth distribution using a dynamic TRIM code and then the Auger signal was calculated from the output of the TRIM simulation. It will be shown that using a single fitting parameter all depth profiles measured on various layer structures could be properly evaluated. Based on our evaluation technique we can predict that a depth profile taken on a step‐function‐like transition is not sensitive to the quality of the interface. On the other hand, small changes in the interface of thin‐layer structures result in clearly visible changes in the Auger depth profile. © 1998 John Wiley & Sons, Ltd.