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Quantitative AES. VIII: analysis of auger electron intensities from elemental data in a digital auger database
Author(s) -
Seah M. P.,
Gilmore I. S.
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199811)26:12<908::aid-sia438>3.0.co;2-h
Subject(s) - auger , atomic physics , auger electron spectroscopy , resolution (logic) , spectral line , range (aeronautics) , chemistry , electron , matrix (chemical analysis) , atomic number , beam (structure) , physics , nuclear physics , optics , materials science , chromatography , astronomy , artificial intelligence , computer science , composite material
An analysis of the correlation of theoretical predictions for Auger electron intensities is made with the experimental data of the high‐resolution digital Auger database. This analysis covers single‐element samples measured for 5 keV and 10 keV beam energies. The spectral data are for wide scans of 20–2500 eV at 1 eV energy resolution and 1 eV energy intervals, as well as narrow scans at 0.25 eV energy resolution and 0.1 eV energy intervals. All spectra have the instrument intensity/energy response function removed so that peak areas are measured in units of electrons emitted per steradian per incident electron. Correlations are made for calculations of the intensities using the cross‐section of Casnati et al . applied to the K, L, M and N shells, the backscattering factor of Shimizu and the inelastic mean free paths of Tanuma et al . The intensities, summed over all peaks relating to initial ionizations in shells of a given principal quantum number, correlate with the theoretical predictions with no fitting parameters, with a mean error of a factor of only 1.04 and a scatter factor of 1.3. Expressions are provided to extend the database to other beam energies and angles of incidence. General equations are also provided to extract new sensitivity factors for the average matrix, which lead to matrix factors that effectively reduce to unity for peaks above 175 eV, instead of the traditional matrix factors that cover a range of 0.1–7.2. These sensitivity factors for the average matrix may be used for peak areas, peak heights or differential peak‐to‐peak intensities. In the latter two cases, spectral broadening may be necessary to obtain accurate results. © 1998 John Wiley & Sons, Ltd.