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Phase formation in ion beam bombarded Al–Au multilayers using high‐current 2.0 MeV 4 He + ions
Author(s) -
Markwitz A.,
Matz W.
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199808)26:9<650::aid-sia409>3.0.co;2-5
Subject(s) - intermetallic , materials science , silicon , phase (matter) , ion , evaporation , substrate (aquarium) , analytical chemistry (journal) , carbon fibers , ion beam mixing , ion beam , diffraction , layer (electronics) , crystallography , ion beam deposition , metallurgy , chemistry , nanotechnology , optics , alloy , composite material , physics , oceanography , organic chemistry , chromatography , composite number , thermodynamics , geology
High‐current ion beam bombardment (IBB) was performed to interdiffuse Al–Au multilayers produced by evaporation on flat substrates of carbon, silicon and gold (typical thickness of each layer 150 nm, packages consist of 2 and 2.5 periods). During IBB with 2 MeV 4 He + ions, the Al–Au interdiffusion was measured simultaneously with Rutherford backscattering (RBS). A complete mixing of the multilayers close to the surface is achieved within a few minutes and observed by variations in the Al–Au ratios. X‐ray diffraction (XRD) was used to study the phase formation in detail. In as‐deposited specimens only the reflections of both metals are detected, whereas after IBB the main intermetallic phase is AlAu 2 . Small amounts of further Al–Au phases are observed additionally in dependence on the substrate type. It was deduced from complementary RBS and XRD analyses that intermixing in such multilayered systems is thermally dominated. © 1998 John Wiley & Sons, Ltd.