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Identification of LEIS contributions observed in the ion kinetic energy distributions collected on a cameca IMS‐3f SIMS instrument
Author(s) -
Franzreb Klaus,
Pratt Allen,
Splinter Steven,
van der Heide Paul
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199807)26:8<597::aid-sia399>3.0.co;2-i
Subject(s) - kinetic energy , ion , low energy ion scattering , chemistry , secondary ion mass spectrometry , analytical chemistry (journal) , mass spectrometry , atomic physics , physics , organic chemistry , chromatography , quantum mechanics
Kinetic energy distributions of the secondary ions and scattered ions of O + , Cs + and Ar + (bombardment with primary ions of O − , O 2 + , Cs + and Ar + was utilized) were obtained from the elemental surfaces of Mg, Al, Si, Ag and Pb using a modified Cameca IMS‐3f magnetic sector mass spectrometer. In addition, the distributions of O + were acquired for O 2 + ion surface bombardment of several standard reference materials (Ti‐base alloys of SRM648 and SRM649) and geological samples [pyrrhotite (Fe (1− x ) S) and arsenopyrite (FeAsS)]. Distinct features attributable to elastic binary projectile/target backscattering collisions were found to be superimposed in the data. Hence, a full characterization of these kinetic ion energy distributions could be made. As a result it is possible to identify both the secondary ion and scattered ion contributions present in the collected kinetic energy distributions and to perform low‐energy primary ion surface scattering (LEIS) experiments combined with in situ secondary ion mass spectrometry (SIMS) analysis, albeit to a reduced sensitivity and resolution compared to those possible on dedicated LEIS instruments. © 1998 John Wiley & Sons, Ltd.