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Electron irradiation of dielectric solids: surface electric field calculation
Author(s) -
Dapor Maurizio,
Miotello Antonio
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199806)26:7<531::aid-sia406>3.0.co;2-o
Subject(s) - electron , electric field , irradiation , monte carlo method , dielectric , atomic physics , space charge , surface charge , insulator (electricity) , secondary electrons , physics , materials science , condensed matter physics , optoelectronics , nuclear physics , quantum mechanics , statistics , mathematics
When an insulator is subject to electron irradiation, the injected electrons recombine with positive charges left near the irradiated surface when secondary electrons are emitted. We present our calculations of the time evolution of the surface electric field obtained by integration of the continuity equation for the space charge, adopting as the charge source term the distribution of the absorbed electrons as obtained by a Monte Carlo simulation. © 1998 John Wiley & Sons, Ltd.