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Resolution enhancement of x‐ray photoelectron spectra by maximum entropy deconvolution
Author(s) -
Splinter S. J.,
McIntyre N. S.
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199803)26:3<195::aid-sia364>3.0.co;2-#
Subject(s) - deconvolution , spectral line , principle of maximum entropy , x ray , x ray photoelectron spectroscopy , resolution (logic) , analytical chemistry (journal) , physics , materials science , nuclear magnetic resonance , optics , chemistry , mathematics , statistics , computer science , astronomy , artificial intelligence , chromatography
The maximum entropy method (MEM) is applied to the deconvolution of x‐ray photoelectron spectra. This method provides the least‐biased estimate of the unbroadened spectrum by using the Shannon information content as the regularizing functional. The large‐scale, non‐linear optimization problem is solved using a robust variable metric sequential‐quadratic programming (SQP) algorithm implemented on a personal computer (PC). The program is tested on simulated spectra and then shown to provide reliable resolution enhancement of measured spectra by unfolding a measured instrumental resolution function. Typical resolution enhancements of 50% are achievable in <15 min of computer time. © 1998 John Wiley & Sons, Ltd.