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Analysis of three‐dimensional SIMS images using image cross‐correlation spectroscopy
Author(s) -
Srivastava M.,
Petersen N. O.,
Mount G. R.,
Kingston D. M.,
McIntyre N. S.
Publication year - 1998
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199803)26:3<188::aid-sia359>3.0.co;2-e
Subject(s) - stack (abstract data type) , cluster analysis , spectroscopy , uncorrelated , chemistry , mineralogy , analytical chemistry (journal) , materials science , mathematics , statistics , physics , computer science , chromatography , quantum mechanics , programming language
Three‐dimensional (3D) SIMS images of secondary ion distributions in a solid volume can be produced from a stack of individual images acquired sequentially at different depths during depth profiling of the solid. While it is often possible to obtain visual correlations of large‐scale features that occur in several images in the stack, the correlation of less‐obvious features requires a more mathematical approach. We present here two cases where image cross‐correlation spectroscopy (ICCS) can be used to clarify the presence or absence of organized structure in a 3D depth profile. In one example, the images of deuterium distribution in a zirconium oxide thin film were confirmed to exhibit order over a series of images, thereby suggesting the existence of continuous pores in the material. In a second example, the apparent clustering of gold distributions in a 3D profile of an arsenopyrite mineral was shown to be uncorrelated and likely an artefact of data collection. © 1998 John Wiley & Sons, Ltd.