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Application of XPS and factor analysis for non‐conducting materials
Author(s) -
Oswald S.,
Baunack S.
Publication year - 1997
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199711)25:12<942::aid-sia335>3.0.co;2-a
Subject(s) - concatenation (mathematics) , x ray photoelectron spectroscopy , background subtraction , multivariate statistics , multivariate analysis , electron spectroscopy , subtraction , spectroscopy , computational physics , analytical chemistry (journal) , engineering physics , materials science , computer science , physics , chemistry , mathematics , nuclear magnetic resonance , artificial intelligence , environmental chemistry , arithmetic , machine learning , quantum mechanics , pixel
Data analysis with multivariate mathematical methods is commonly used more and more also for applications in electron spectroscopy. This paper concerns the use of factor analysis in x‐ray photoelectron spectroscopy and is focused on the problems occurring during investigations of non‐conducting materials. Possibilities of the correction of the charging effect are discussed, considering the aspects of background subtraction and spectra concatenation. The efforts of the proposed procedures are demonstrated with model experiments and depth profile measurements. © 1997 John Wiley & Sons, Ltd.