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A Novel Approach for the Determination of the Actual Incidence Angle in a Magnetic‐sector SIMS Instrument
Author(s) -
Jiang ZhiXiong,
Alkemade Paul F. A.
Publication year - 1997
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199709)25:10<817::aid-sia305>3.0.co;2-o
Subject(s) - angle of incidence (optics) , magnetic field , beam (structure) , sample (material) , incidence (geometry) , optics , extraction (chemistry) , electrode , surface (topology) , materials science , analytical chemistry (journal) , physics , chemistry , mathematics , geometry , chromatography , quantum mechanics , thermodynamics
A novel approach for the determination of the incidence angle in a magnetic‐sector SIMS instrument is described. It is based on accurate mapping of the primary beam in the extraction field near the sample surface. The accuracy of the method and the applicability of simple formulas are discussed in detail. In addition, the variation in the incidence angle over the rastered area has been measured and it is shown that, by adjusting the potential on the extraction electrode, this angle can be selected. Grazingly incident primary beams with energies well below 1 keV have been produced. © 1997 by John Wiley & Sons, Ltd.