Premium
Topographic Correction of 3D SIMS Images
Author(s) -
Wagter M. L.,
Clarke A. H.,
Taylor K. F.,
van der Heide P. A. W.,
McIntyre N. S.
Publication year - 1997
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199709)25:10<788::aid-sia300>3.0.co;2-w
Subject(s) - volume (thermodynamics) , surface (topology) , secondary ion mass spectrometry , sputtering , computer graphics (images) , materials science , chemistry , computer science , ion , physics , geometry , nanotechnology , mathematics , thin film , organic chemistry , quantum mechanics
In order to provide an accurate rendition of a three‐dimensional (3D) volume obtained by SIMS, it is necessary to take account of the topography of the original surface and the relative sputter rates of the different structures within the volume. We describe a method that corrects both distortions to 3D SIMS images. An atomic force microscope is used to produce a topographic images of the area analysed by SIMS, both before and after the depth profile. This information is convoluted with the 3D SIMS image to produce a correct 3D image of the changes in composition within the volume of the material. © 1997 by John Wiley & Sons, Ltd.