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Simulation of Energy Distribution for Scanning X‐ray Probe
Author(s) -
Iwai Hideo,
Oiwa Retsu,
Larson Paul E.,
Kudo Masahiro
Publication year - 1997
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199703)25:3<202::aid-sia227>3.0.co;2-g
Subject(s) - monochromator , diffraction , optics , beam (structure) , monochromatic color , physics , atomic physics , wavelength
The energy distribution of a scanning x‐ray probe which is equipped with an elliptical mirror monochromator has been simulated with optical ray tracing, a numerically described energy distribution of Al Kα x‐ray and a rocking curve. The rocking curve was estimated by dynamic diffraction theory with structure factors for quartz. The peak energy of the diffracted x‐ray beam did not change with beam size, although the shapes of energy distribution were found to change slightly. Using the simulated x‐ray energy distribution and the apparatus function, the energy width of the Fermi edge was simulated, which is to be compared with that obtained experimentally by monochromatic Al Kα x‐ray excitation. The widths of the silver Fermi edge spectra were measured with different x‐ray beam sizes. In addition, the relation between the x‐ray beam position on the anode and the diffracted x‐ray energy distribution was investigated. The peak energy of the diffracted x‐ray beam was found to move with the x‐ray beam position. It is shown that this kind of simulation can be effectively used for estimating the energy distribution and the intensity distribution of the diffracted x‐ray beam. © 1997 by John Wiley & Sons, Ltd.