Premium
Refined Approach to PCA‐assisted Auger Depth Profile Analysis
Author(s) -
Schöpke A.,
Kelling S.
Publication year - 1997
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199701)25:1<5::aid-sia197>3.0.co;2-h
Subject(s) - auger , principal component analysis , spectral line , analytical chemistry (journal) , auger electron spectroscopy , chemistry , computational physics , mathematics , atomic physics , statistics , physics , chromatography , nuclear physics , astronomy
A refined approach to the calculation of Auger depth profiles by means of principal component analysis (PCA) is presented. The refinement consists of the use of normalized spectra. In this way, a more reliable determination of the number of chemical compounds and their location in the depth profile is possible. Moreover, the use and the archiving of external standard spectra and the calculation of unknown standard spectra are simplified. The method is described in detail by the analysis of an FeSi xfilm on Si. © 1997 by John Wiley & Sons, Ltd.