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Depth Profiling by Ion Beams Analysis Techniques for the Characterization of Interdiffusion in Multilayered Au–Al Systems
Author(s) -
Markwitz A.,
Demortier G.
Publication year - 1996
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199612)24:13<868::aid-sia199>3.0.co;2-g
Subject(s) - aluminium , ion beam analysis , materials science , ion , analytical chemistry (journal) , resolution (logic) , spectroscopy , ion beam , characterization (materials science) , chemistry , nanotechnology , metallurgy , physics , organic chemistry , chromatography , quantum mechanics , artificial intelligence , computer science
Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au–Al multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to gold, the depth resolution of the aluminium distributions is limited even when the signals are in a background‐free region of the spectrum. In addition, the aluminium depth profiles were measured using the resonant nuclear reaction 27 Al(p, γ) 28 Si at 992 keV with a high depth resolution of 5 nm at the specimen surface. High‐energy backscattering spectroscopy with 7.6 MeV 4 He ions was used to investigate light element contaminantions (depth resolved), e.g. oxygen, at the specimen surface, the Au–Al interfaces and at the Au/C interface.