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Enhanced Resolution of Depth Profiles Using Two‐dimensional XPS Data
Author(s) -
Aminov K. L.,
Jørgensen J. S.,
Boiden Pedersen J.
Publication year - 1996
Publication title -
surface and interface analysis
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.52
H-Index - 90
eISSN - 1096-9918
pISSN - 0142-2421
DOI - 10.1002/(sici)1096-9918(199601)24:1<23::aid-sia81>3.0.co;2-y
Subject(s) - x ray photoelectron spectroscopy , resolution (logic) , photoelectric effect , excitation , energy (signal processing) , data set , analytical chemistry (journal) , computational physics , chemistry , materials science , optics , physics , nuclear magnetic resonance , statistics , computer science , mathematics , artificial intelligence , quantum mechanics , chromatography
It is shown that the accuracy by which a concentration–depth profile can be estimated from the inelastic background of an XPS spectrum is dramatically improved by using two‐dimensional (2D) data. The energy loss distribution of the photoelectrons for several values of the detection angle, or the energy of the excitation source, are treated as a single 2D data set. The resolution of the depth profile estimated from this set is far better than can be obtained from any single XPS spectrum.