Open AccessNanofabrication of silicon Mie resonators and all-dielectric colored metasurfaces
Author(s) -
Igor Ozerov,
Julien Proust,
F. Bedu,
Bruno Gallas,
Nicolas Bonod
Publication year - 2017
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nanolithography , resonator , dielectric , silicon , colored , optoelectronics , materials science , optics , nanophotonics , fabrication , physics , medicine , alternative medicine , pathology , composite material