Open AccessNanofabrication of silicon Mie resonators and all-dielectric colored metasurfaces
Author(s) -
Igor Ozerov,
Julien Proust,
F. Bedu,
Bruno Gallas,
Nicolas Bonod
Publication year - 2017
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - monocrystalline silicon , materials science , nanolithography , silicon , resonator , deep reactive ion etching , etching (microfabrication) , electron beam lithography , lithography , optoelectronics , amorphous silicon , optics , reactive ion etching , fabrication , nanotechnology , resist , crystalline silicon , physics , medicine , alternative medicine , pathology , layer (electronics)
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