Open AccessIDENTIFICATION OF TEST STRUCTURES FOR REDUCED ORDER MODELING OF THE SQUEEZE FILM DAMPING IN MEMS
Author(s) -
Aurelio Soma,
G. de Pasquale
Publication year - 2007
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , identification (biology) , materials science , computer science , nanotechnology , botany , biology