Open AccessMEMS for in-situ TEM nanoscience on dry and wet samples
Author(s) -
Laurent Jalabert,
Tadashi Ishida,
Toshiyuki Sato,
Minoru Egawa,
G. Valet,
Sébastian Volz,
Hideaki Fujita
Publication year - 2016
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microelectromechanical systems , nanotechnology , nanoscopic scale , materials science , nanowire , actuator , silicon , transmission electron microscopy , optoelectronics , electrical engineering , engineering