Open AccessPRODUCTION OF 3-10 µm MICROBUBBLES SUITED FOR ULTRASONIC IMAGING BY 2.5D NANOFLUIDIC DEVICES
Author(s) -
Sébastien Méance,
Lucas Pages,
Anne Marie Gué,
Pierre Joseph
Publication year - 2014
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - microbubbles , dispersity , materials science , microfluidics , etching (microfabrication) , ultrasonic sensor , nanotechnology , reactive ion etching , ultrasonic imaging , biocompatibility , volumetric flow rate , deep reactive ion etching , optoelectronics , ultrasound , acoustics , metallurgy , physics , layer (electronics) , quantum mechanics , polymer chemistry